DocumentCode
1656921
Title
Dynamic aging of CMOS SOI transistors in circuit operation
Author
Guichard, E. ; Reimbold, G. ; Cristoloveanu, S. ; Leroux, C. ; Blachier, D. ; Borel, G. ; Giffard, B.
Author_Institution
CEA, Centre d´´Etudes Nucleaires de Grenoble, France
fYear
1995
Firstpage
647
Lastpage
650
Abstract
SOI transistors, operating in dynamic mode, have been fully investigated using dedicated test circuits. Indeed, specific circuits have been built in order to make, in-situ monitoring of electrical characteristics of n- and p-MOSFETs. We have demonstrated that physical mechanisms of the degradation, in partially depleted SOI devices, are comparable after static and dynamic stress. Indeed, back interface degradation analysis has revealed that, even after dynamic aging, p-MOSFETs are submitted to electron trapping while it is not the case for n-MOSFETs. The “quasi static” approach is not applicable in inverter-type circuit, and could be explained by successive injection of holes and electrons due to the specific bias waveform, leading to an enhancement of the degradation
Keywords
MOSFET; ageing; electron traps; hot carriers; semiconductor device reliability; semiconductor device testing; silicon-on-insulator; CMOS SOI transistors; back interface degradation analysis; circuit operation; dedicated test circuits; dynamic aging; dynamic mode; electrical characteristics; electron trapping; in-situ monitoring; inverter-type circuit; partially depleted SOI devices; specific bias waveform; Aging; Capacitance; Circuit testing; Degradation; Electric variables; Electrons; Frequency; MOSFET circuits; Ring oscillators; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location
Washington, DC
ISSN
0163-1918
Print_ISBN
0-7803-2700-4
Type
conf
DOI
10.1109/IEDM.1995.499303
Filename
499303
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