• DocumentCode
    1656921
  • Title

    Dynamic aging of CMOS SOI transistors in circuit operation

  • Author

    Guichard, E. ; Reimbold, G. ; Cristoloveanu, S. ; Leroux, C. ; Blachier, D. ; Borel, G. ; Giffard, B.

  • Author_Institution
    CEA, Centre d´´Etudes Nucleaires de Grenoble, France
  • fYear
    1995
  • Firstpage
    647
  • Lastpage
    650
  • Abstract
    SOI transistors, operating in dynamic mode, have been fully investigated using dedicated test circuits. Indeed, specific circuits have been built in order to make, in-situ monitoring of electrical characteristics of n- and p-MOSFETs. We have demonstrated that physical mechanisms of the degradation, in partially depleted SOI devices, are comparable after static and dynamic stress. Indeed, back interface degradation analysis has revealed that, even after dynamic aging, p-MOSFETs are submitted to electron trapping while it is not the case for n-MOSFETs. The “quasi static” approach is not applicable in inverter-type circuit, and could be explained by successive injection of holes and electrons due to the specific bias waveform, leading to an enhancement of the degradation
  • Keywords
    MOSFET; ageing; electron traps; hot carriers; semiconductor device reliability; semiconductor device testing; silicon-on-insulator; CMOS SOI transistors; back interface degradation analysis; circuit operation; dedicated test circuits; dynamic aging; dynamic mode; electrical characteristics; electron trapping; in-situ monitoring; inverter-type circuit; partially depleted SOI devices; specific bias waveform; Aging; Capacitance; Circuit testing; Degradation; Electric variables; Electrons; Frequency; MOSFET circuits; Ring oscillators; Stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1995. IEDM '95., International
  • Conference_Location
    Washington, DC
  • ISSN
    0163-1918
  • Print_ISBN
    0-7803-2700-4
  • Type

    conf

  • DOI
    10.1109/IEDM.1995.499303
  • Filename
    499303