Title :
Parallel operation of microhollow cathode discharges
Author :
Shi, W. ; Schoenbach, Karl H.
Author_Institution :
Phys. Electron. Res. Inst., Old Dominion Univ., Norfolk, VA, USA
Abstract :
Summary form only given. The DC current-voltage characteristics of microhollow cathode discharges has, in certain ranges of the discharge current, a positive slope. In these current ranges it should be possible to operate multiple discharges in parallel without individual ballast, and be used as flat panel excimer lamps or large area plasma cathodes. In order to verify this hypothesis we have studied the parallel operation of two microhollow cathode discharges of 100 /spl mu/m hole diameter in argon at pressures from 100 Torr to 800 Torr.
Keywords :
argon; glow discharges; plasma diagnostics; 100 to 800 torr; Ar; DC current-voltage characteristics; discharge current; flat panel excimer lamps; large area plasma cathodes; microhollow cathode discharges; parallel operation; Anodes; Cathodes; Electron emission; Electronic ballasts; Geometry; Ionization; Nuclear and plasma sciences; Plasma waves; Resistors; Voltage;
Conference_Titel :
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location :
Raleigh, NC, USA
Print_ISBN :
0-7803-4792-7
DOI :
10.1109/PLASMA.1998.677875
