Title :
New method to cover powder substrates with metallic nanoparticles by magnetron sputtering
Author :
Eberhardt, Dario ; Severo, Tiago C. ; Migowski, Pedro ; Dupont, Jairton ; da S Bussamara R, Roberta ; Teixeira, Sergio R.
Author_Institution :
Univ. de Caxias do Sul (UCS), Bento Gonçalves, Brazil
Abstract :
This article reports a new method to cover powder substrates with metallic nanoparticles (NPs) via an electro-magnetic vibrational device adapted to magnetron sputtering equipment. In the present work, it is presented the deposition of Cu, Au, Ni and Pd over three different substrates, Al2O3, SBA15 and Lipase, each one with particular parameters. The size and homogeneity of the NPs deposited with this new method were been measured by several technics as TEM, HRTEM, SEM, AFM and EDS and confirmed the efficiency of the process. Applications on the production of catalyzers, fuel cells, gas sensors and ionic liquids based on NPs can be explored with this technic.
Keywords :
X-ray chemical analysis; atomic force microscopy; copper; electromagnetic oscillations; gold; nanofabrication; nanoparticles; nickel; palladium; particle size; scanning electron microscopy; sputter deposition; transmission electron microscopy; AFM; Al2O3; Al2O3 substrate; Au; Cu; EDS; HRTEM; Ni; Pd; SBA15 substrate; SEM; TEM; catalyzer production; electro-magnetic vibrational device; fuel cells; gas sensors; lipase substrate; magnetron sputtering; metallic nanoparticles; powder substrates cover; Aluminum oxide; Gold; Nanoparticles; Nickel; Powders; Sputtering; Substrates;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on
Conference_Location :
Toronto, ON
DOI :
10.1109/NANO.2014.6968111
