New method to cover powder substrates with metallic nanoparticles by magnetron sputtering

Author

Eberhardt, Dario ; Severo, Tiago C. ; Migowski, Pedro ; Dupont, Jairton ; da S Bussamara R, Roberta ; Teixeira, Sergio R.

Author_Institution

Univ. de Caxias do Sul (UCS), Bento Gonçalves, Brazil

fYear

2014

fDate

18-21 Aug. 2014

Firstpage

398

Lastpage

401

Abstract

This article reports a new method to cover powder substrates with metallic nanoparticles (NPs) via an electro-magnetic vibrational device adapted to magnetron sputtering equipment. In the present work, it is presented the deposition of Cu, Au, Ni and Pd over three different substrates, Al₂O₃, SBA15 and Lipase, each one with particular parameters. The size and homogeneity of the NPs deposited with this new method were been measured by several technics as TEM, HRTEM, SEM, AFM and EDS and confirmed the efficiency of the process. Applications on the production of catalyzers, fuel cells, gas sensors and ionic liquids based on NPs can be explored with this technic.

Keywords

X-ray chemical analysis; atomic force microscopy; copper; electromagnetic oscillations; gold; nanofabrication; nanoparticles; nickel; palladium; particle size; scanning electron microscopy; sputter deposition; transmission electron microscopy; AFM; Al₂O₃; Al₂O₃ substrate; Au; Cu; EDS; HRTEM; Ni; Pd; SBA15 substrate; SEM; TEM; catalyzer production; electro-magnetic vibrational device; fuel cells; gas sensors; lipase substrate; magnetron sputtering; metallic nanoparticles; powder substrates cover; Aluminum oxide; Gold; Nanoparticles; Nickel; Powders; Sputtering; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on

Conference_Location

Toronto, ON

Type

conf

DOI

10.1109/NANO.2014.6968111

Filename

6968111