Title :
Active substrate membrane probe card
Author :
Leung, Justin ; Zargari, Masoud ; Wooley, Bruce A. ; Wong, S.
Author_Institution :
Center for Integrated Syst., Stanford Univ., CA, USA
Abstract :
A monolithic active membrane probe card capable of wafer-level probing of high speed integrated circuits is presented. The key feature of this probe card is the integration of test circuitry in close proximity to the probe tips. The fabrication of the probe card involves the incorporation of a polyimide membrane and tungsten probe tips on a BiCMOS wafer. A measurement comparison with needle probes demonstrates an enhanced capability for at-speed probing of circuits at the wafer-level
Keywords :
BiCMOS integrated circuits; integrated circuit testing; membranes; probes; test equipment; BiCMOS wafer; W; W probe tips; active membrane probe card; active substrate; fabrication; high speed integrated circuits; monolithic probe card; polyimide membrane; test circuitry; wafer-level probing; BiCMOS integrated circuits; Biomembranes; Circuit testing; Fabrication; High speed integrated circuits; Integrated circuit measurements; Needles; Polyimides; Probes; Tungsten;
Conference_Titel :
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-2700-4
DOI :
10.1109/IEDM.1995.499317
