Title :
Theoretical study on pulsed photothermal deformation in semiconductors
Author :
Cheng, Jian-Chun ; Zhang, Shu-yi
Author_Institution :
Lab. of Photoacoust. Sci., Nanjing Univ., China
Abstract :
A theoretical study on pulsed photothermal deformation (PPTD) in semiconductors is presented. The explicit expressions of the temporal fields of plasma and thermal waves within semiconductors, excited by an incidence of the pulsed laser, are derived based on the eigenfunction method, instead of the usual Laplace transform. The three-dimensional Navier-Stokes equation, including the thermoelastic and electronic-strain effects, is solved analytically under quasi-static approximation for semiconductor wafers. The time evolution of the PPTD signal is simulated numerically for different characterized parameters of semiconductors
Keywords :
Navier-Stokes equations; eigenvalues and eigenfunctions; photothermal effects; semiconductors; solid-state plasma; eigenfunction method; electronic-strain effects; plasma waves; pulsed photothermal deformation; quasi-static approximation; semiconductors; temporal fields; thermal waves; thermoelastic effects; three-dimensional Navier-Stokes equation; time evolution; Eigenvalues and eigenfunctions; Laplace equations; Laser excitation; Laser theory; Navier-Stokes equations; Numerical simulation; Optical pulses; Plasma waves; Semiconductor lasers; Thermoelasticity;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275954
