Title :
Quasi-static finite-element analysis for MEMS transmission lines
Author :
Wang Ying ; Zhu Shouzheng ; Lai Zongsheng
Author_Institution :
East China Normal Univ., Shanghai, China
fDate :
6/21/1905 12:00:00 AM
Abstract :
Microelectromechanical systems (MEMS) technology is considered to be one of key technologies in the coming century. In this paper, the quasi-static finite element method (FEM) is applied to analyze a kind of MEMS microwave transmission line, the finite-grounded coplanar waveguide. The capacitance per unit length and intrinsic impedance of the line are derived. Different materials are calculated to find the proper design parameters.
Keywords :
capacitance; coplanar transmission lines; coplanar waveguides; electric impedance; finite element analysis; micromechanical devices; transmission line theory; waveguide theory; FEM; MEMS transmission lines; capacitance per unit length; finite-grounded coplanar waveguide; intrinsic impedance; microelectromechanical systems; microwave transmission lines; quasi-static finite-element analysis; Capacitance; Coplanar transmission lines; Dielectric losses; Dielectric substrates; Impedance; Micromechanical devices; Paper technology; Power transmission lines; Transmission line theory; Transmission lines;
Conference_Titel :
Computational Electromagnetics and Its Applications, 1999. Proceedings. (ICCEA '99) 1999 International Conference on
Print_ISBN :
0-7803-5802-3
DOI :
10.1109/ICCEA.1999.825153
