Title :
Analyses of layered SAW substrates by time dependent particle displacement
Author :
Furukawa, Shoji ; Furukawa, Hiroshi ; Nomura, Tooru ; Yasuda, Tsutomu
Author_Institution :
Dept. of Comput. Sci, & Electron., Kyushu Inst. of Technol., Fukuoka, Japan
Abstract :
It is known that the particle displacement relevant to surface acoustic wave (SAW) propagation becomes ellipsoidal. The time-dependent particle displacement is calculated for layered substrates. It is found that there exists a correlation between the particle displacement distribution and the SAW velocity dispersion. The origin of the appearance of the maximum and minimum points in the dispersion curve is discussed on the basis of mechanical impedance matching
Keywords :
acoustic impedance; surface acoustic wave devices; ultrasonic dispersion; LiTaO3; SAW velocity dispersion; ZnO; dispersion curve; layered SAW substrates; mechanical impedance matching; time dependent particle displacement; Acoustic waves; Equations; Frequency; Glass; Piezoelectric films; Power distribution; Silicon compounds; Substrates; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275969
