Title :
A PN gate polysilicon thin film transistor
Author :
Min, Byung-Hyuk ; Park, Cheol-Min ; Han, Min-Koo
Author_Institution :
Dept. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
We propose and fabricate a new polysilicon thin film transistor (poly-Si TFT) which exhibits the properties of an offset gated structure in the OFF state, while acting as a non-offset structure in the ON state. The fabrication process is compatible with the conventional non-offset poly-Si TFTs process and does not require any additional mask. Experimental results show that the leakage current of the new device is two orders of magnitude lower than that of the non-offset device, while the ON current of the new device is almost identical with that of the non-offset device. It is observed that the ON/OFF current ratio of the proposed poly-Si TFT is improved remarkably
Keywords :
carrier mobility; elemental semiconductors; leakage currents; silicon; thin film transistors; ON/OFF current ratio; Si; leakage current; nonoffset structure; offset gated structure; pn junction gate; polysilicon thin film transistor; Active matrix liquid crystal displays; Current measurement; Electric resistance; Electrodes; Fabrication; Leakage current; Medical simulation; Region 4; Thin film transistors; Voltage;
Conference_Titel :
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-2700-4
DOI :
10.1109/IEDM.1995.499346
