Title :
New spurious suppression cut of thin film/LiNbO3 structure for GHz-range SAW filters
Author :
Yamanouchi, Kazuhiko ; Yasukawa, S. ; Meguro, T. ; Wagatsuma, Y.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
At GHz-range, the generation of spurious waves due to the presence of an Al electrode and a thin film leads to the serious problem in the implementation of high-performance surface acoustic wave (SAW) filters. To obtain the substrate with low spurious wave generation, the propagation characteristics of SAWs on an Al/LiNbO3 layered structure are analyzed. The SiO2/Al/LiNbO3 layered structure with low spurious and temperature stable characteristics is analyzed. A cut angle and film thickness which provide low propagation loss and temperature stable characteristics are also obtained for a leaky SAW on an Al/SiO2/LiTaO3 structure
Keywords :
acoustic microwave devices; band-pass filters; lithium compounds; microwave filters; surface acoustic wave filters; 1 GHz; 4 GHz; Al-LiNbO3 layered structure; Al-SiO2-LiTaO3; LiNbO3; LiTaO3; SAW filters; SAW propagation; SiO2-Al-LiNbO3; cut angle; film thickness; leaky SAW; low spurious wave generation; microwave filters; narrow bandpass filter; temperature stable characteristics; Acoustic propagation; Acoustic waves; Character generation; Electrodes; Filters; Propagation losses; Substrates; Surface acoustic waves; Temperature; Transistors;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275970
