DocumentCode
1657985
Title
Fabrication of a single nanowire circuit made of semiconducting NiS2 by direct-write electron beam lithography and observation of metallic conduction
Author
Kulkarni, G.U. ; Bhuvana, T.
Author_Institution
Chem. & Phys. of Mater. Unit, Jawaharlal Nehru Centre for Adv. Sci. Res., Bangalore, India
fYear
2010
Firstpage
117
Lastpage
117
Abstract
The results from electrical measurements on an individual NiS2 nanowire produced by an innovative method of direct-write electron beam lithography (EBL) are discussed in this presentation. The technique relies on the ability of a metal precursor to serve as an e-beam resist while patterning, which may be transformed to a desired nanomaterial in subsequent step(s). The I-V data from the fabricated circuit was linear and the resistivity estimated was approximately two orders of magnitude less compared to the bulk NiS2 resistivity. This is first direct evidence of metallicity of a NiS2 nanowire at room temperature.
Keywords
electrical resistivity; electron resists; metal-insulator transition; nanoelectronics; nanofabrication; nanolithography; nanopatterning; nanowires; nickel compounds; semiconductor materials; I-V measurements; NiS2; direct-write electron beam lithography; e-beam resist; electrical property; metal precursor; metallic conduction; nanomaterial; nanowire circuit; resistivity; temperature 293 K to 298 K; Circuits; Conductivity; Electron beams; Fabrication; Insulation; Lithography; Nickel; Semiconductivity; Temperature; Thermolysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-3543-2
Electronic_ISBN
978-1-4244-3544-9
Type
conf
DOI
10.1109/INEC.2010.5424565
Filename
5424565
Link To Document