Title :
Electrical characterization and modeling of thin-film humidity sensors
Author :
Bonavita, A. ; Caddemi, A. ; Donato, N. ; Accordino, P. ; Galvagno, S. ; Neri, G.
Author_Institution :
Dipt. di Chimica Industriale e Ingegneria dei Materiali, Messina Univ., Italy
fDate :
6/23/1905 12:00:00 AM
Abstract :
Undoped and Li-doped iron oxide thin films were investigated as humidity sensors. Large variations of the sensor resistance were observed by changing the relative humidity (RH%) between 0 and 100%. The results of an electrochemical impedance spectroscopy (EIS) study performed by measuring the sensor´s complex impedance, were analyzed and employed to extract equivalent circuit models. Such models have humidity-dependent element values and their structure has a direct relationship with the sensor physics. The performance of the films and the results of the model simulations are presented and discussed
Keywords :
electrochemical analysis; equivalent circuits; humidity sensors; iron compounds; lithium; Fe2O3:Li; complex impedance; electrochemical impedance spectroscopy; equivalent circuit models; humidity-dependent element values; relative humidity; sensor physics; sensor resistance; thin-film humidity sensors; Electric resistance; Electrical resistance measurement; Electrochemical impedance spectroscopy; Humidity; Iron; Performance evaluation; Sensor phenomena and characterization; Thin film circuits; Thin film sensors; Transistors;
Conference_Titel :
Electronics, Circuits and Systems, 2001. ICECS 2001. The 8th IEEE International Conference on
Print_ISBN :
0-7803-7057-0
DOI :
10.1109/ICECS.2001.957565
