Electrical characterization and modeling of thin-film humidity sensors

Author

Bonavita, A. ; Caddemi, A. ; Donato, N. ; Accordino, P. ; Galvagno, S. ; Neri, G.

Author_Institution

Dipt. di Chimica Industriale e Ingegneria dei Materiali, Messina Univ., Italy

Volume

2

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

673

Abstract

Undoped and Li-doped iron oxide thin films were investigated as humidity sensors. Large variations of the sensor resistance were observed by changing the relative humidity (RH%) between 0 and 100%. The results of an electrochemical impedance spectroscopy (EIS) study performed by measuring the sensor´s complex impedance, were analyzed and employed to extract equivalent circuit models. Such models have humidity-dependent element values and their structure has a direct relationship with the sensor physics. The performance of the films and the results of the model simulations are presented and discussed

Keywords

electrochemical analysis; equivalent circuits; humidity sensors; iron compounds; lithium; Fe₂O₃:Li; complex impedance; electrochemical impedance spectroscopy; equivalent circuit models; humidity-dependent element values; relative humidity; sensor physics; sensor resistance; thin-film humidity sensors; Electric resistance; Electrical resistance measurement; Electrochemical impedance spectroscopy; Humidity; Iron; Performance evaluation; Sensor phenomena and characterization; Thin film circuits; Thin film sensors; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics, Circuits and Systems, 2001. ICECS 2001. The 8th IEEE International Conference on

Print_ISBN

0-7803-7057-0

Type

conf

DOI

10.1109/ICECS.2001.957565

Filename

957565