Title :
High accuracy measurement of aspherical surface by point diffraction interferometry
Author :
Fen Gao ; Zhuangde Jiang ; Yi Feng ; Bing Li
Author_Institution :
State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China
Abstract :
Point diffraction interferometry (PDI) provides a promising method for measurement of spherical and aspherical surfaces with nanometer or even sub-nanometer (RMS) accuracy. In this paper, an optimal design of PDI system is discussed in detail and experiment systems are established. A 152.4 mm aspheric mirror is measured in our experiment and the test results show a good agreement with Zygo interferometer testing results. Also, a novel method which combining the point diffraction interferometry and annular subaperture stitching technology for high accuracy measurement of large-departure aspherical surface is proposed and the principles are presented.
Keywords :
aspherical optics; light diffraction; light interferometers; light interferometry; mirrors; surface topography measurement; PDI system; RMS; Zygo interferometer testing; annular subaperture stitching technology; aspheric mirror; large-departure aspherical surface measurement; point diffraction interferometry system; size 152.4 mm; spherical surface measurement; Accuracy; Adaptive optics; Diffraction; Optical diffraction; Optical interferometry; Optical surface waves; Optical variables measurement;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on
Conference_Location :
Toronto, ON
DOI :
10.1109/NANO.2014.6968177
