Use of annular saw for the cutting of quartz resonator blanks and substrates

Author

Dowsett, J. ; Spencer, R.B. ; Morley, P.

Author_Institution

STC Components, Harlow, UK

fYear

1988

Firstpage

205

Lastpage

207

Abstract

The use of a large annular saw with a thin stressed blade for the cutting of tight tolerance blanks is described. Results achieved in full production of AT-cut blanks are reported. The extension of its use to cutting doubly rotated cuts such as the SC cut is also described. The machine is capable of indexing each feed step to maintain thickness control to better than 15 μm. Coupled with the cut feed mechanism is a blade distortion sensor which detects blade deflection on a continuous analog plot and gives warning of blade wear and the need to redress the diamond cutting edge

Keywords

crystal resonators; cutting; electron device manufacture; thickness control; AT-cut blanks; SC cut; annular saw; blade deflection; blade distortion sensor; blade wear; cut feed mechanism; cutting; diamond cutting edge; doubly rotated cuts; electron device manufacture; feed step; quartz resonator blanks; substrates; thickness control; thin stressed blade; tight tolerance blanks; Bars; Blades; Face detection; Feeds; Frequency estimation; Machinery production industries; Sawing machines; Silicon; Slurries; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 1988., Proceedings of the 42nd Annual

Conference_Location

Baltimore, MD

Type

conf

DOI

10.1109/FREQ.1988.27603

Filename

27603