Title :
Use of annular saw for the cutting of quartz resonator blanks and substrates
Author :
Dowsett, J. ; Spencer, R.B. ; Morley, P.
Author_Institution :
STC Components, Harlow, UK
Abstract :
The use of a large annular saw with a thin stressed blade for the cutting of tight tolerance blanks is described. Results achieved in full production of AT-cut blanks are reported. The extension of its use to cutting doubly rotated cuts such as the SC cut is also described. The machine is capable of indexing each feed step to maintain thickness control to better than 15 μm. Coupled with the cut feed mechanism is a blade distortion sensor which detects blade deflection on a continuous analog plot and gives warning of blade wear and the need to redress the diamond cutting edge
Keywords :
crystal resonators; cutting; electron device manufacture; thickness control; AT-cut blanks; SC cut; annular saw; blade deflection; blade distortion sensor; blade wear; cut feed mechanism; cutting; diamond cutting edge; doubly rotated cuts; electron device manufacture; feed step; quartz resonator blanks; substrates; thickness control; thin stressed blade; tight tolerance blanks; Bars; Blades; Face detection; Feeds; Frequency estimation; Machinery production industries; Sawing machines; Silicon; Slurries; Surface acoustic waves;
Conference_Titel :
Frequency Control Symposium, 1988., Proceedings of the 42nd Annual
Conference_Location :
Baltimore, MD
DOI :
10.1109/FREQ.1988.27603
