• DocumentCode
    1660002
  • Title

    Design, fabrication and characterization of high Q-factor SOI microring resonators

  • Author

    Maine, S. ; Marris-Morini, D. ; Vivien, L. ; Cassan, E. ; Laval, S. ; El Melhaoui, L. ; Fédéli, J.M. ; Han, B. ; Orobtchouk, R. ; Benyattou, T.

  • Author_Institution
    CNRS, Univ. Paris-sud XI, Orsay
  • fYear
    2007
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Design, fabrication and characterization of SOI ring resonators using slightly etched rib waveguides are reported. Q-factor of 35300 has been measured for a 100 mum ring radius and a 450 nm coupling gap.
  • Keywords
    Q-factor; integrated optics; micro-optics; optical couplers; optical design techniques; optical fabrication; optical resonators; optical waveguides; rib waveguides; silicon-on-insulator; coupling gap; etched rib waveguides; microring resonators; quality factor; silicon-on-insulator; size 100 mum; size 450 nm; Electromagnetic waveguides; Etching; Fabrication; Optical attenuators; Optical resonators; Optical ring resonators; Optical waveguides; Propagation losses; Q factor; Silicon; ring resonator; silicon microphotonics; silicon-on-insulator; waveguide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2007 4th IEEE International Conference on
  • Conference_Location
    Tokyo
  • Print_ISBN
    978-1-4244-0934-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2007.4347704
  • Filename
    4347704
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1660002