Title :
Design, fabrication and characterization of high Q-factor SOI microring resonators
Author :
Maine, S. ; Marris-Morini, D. ; Vivien, L. ; Cassan, E. ; Laval, S. ; El Melhaoui, L. ; Fédéli, J.M. ; Han, B. ; Orobtchouk, R. ; Benyattou, T.
Author_Institution :
CNRS, Univ. Paris-sud XI, Orsay
Abstract :
Design, fabrication and characterization of SOI ring resonators using slightly etched rib waveguides are reported. Q-factor of 35300 has been measured for a 100 mum ring radius and a 450 nm coupling gap.
Keywords :
Q-factor; integrated optics; micro-optics; optical couplers; optical design techniques; optical fabrication; optical resonators; optical waveguides; rib waveguides; silicon-on-insulator; coupling gap; etched rib waveguides; microring resonators; quality factor; silicon-on-insulator; size 100 mum; size 450 nm; Electromagnetic waveguides; Etching; Fabrication; Optical attenuators; Optical resonators; Optical ring resonators; Optical waveguides; Propagation losses; Q factor; Silicon; ring resonator; silicon microphotonics; silicon-on-insulator; waveguide;
Conference_Titel :
Group IV Photonics, 2007 4th IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4244-0934-1
DOI :
10.1109/GROUP4.2007.4347704
