Title :
Real time factory monitoring system
Author :
Perkett, William
Author_Institution :
Eastman Kodak Co., Rochester, NY, USA
Abstract :
Currently, the integrated circuit facility is run by a paperless Process Flow Control computer system. This PFC system provides the operator with all the required information about any lots and allows the operator to make keyboard entries to provide feedback of data to the manager. The objective of the real-time factory monitoring system is to use the data collected by the PFC system to determine the following information: (1) machines that are currently down, (2) machines that are at 100% capacity, (3) machines that have been idle for more than 30 minutes, (4) machines that are currently working on nonproduction runs, (5) machines that have caused lots to fail
Keywords :
computerised monitoring; PFC system; factory monitoring system; integrated circuit facility; nonproduction runs; process flow control computer system; real-time system; Computer displays; Computerized monitoring; Dry etching; Postal services; Process control; Production facilities; Real time systems; Routing; Semiconductor device manufacture; Wet etching;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-2053-0
DOI :
10.1109/ASMC.1994.588265
