DocumentCode :
1660056
Title :
Large sensor array based on functionalized graphene devices
Author :
Luo, Zhengtang ; Singer, Daniel W. ; Berck, Matthew E. ; Somers, Luke A. ; Rotkina, Lolita ; Goldsmith, Brett R. ; Johnson, A. T Charlie
Author_Institution :
Dept. of Phys. & Astron., Univ. of Pennsylvania, Philadelphia, PA, USA
fYear :
2010
Firstpage :
212
Lastpage :
213
Abstract :
Graphene has been shown to have an extraordinary set of electronic properties and its chemical affinity is readily tuned by functionalization with a broad range of molecules. It is known that field effect transistors based on single-layer graphene demonstrate extremely high sensitivity for chemical sensing. It is thus very important to achieve fabrication of integrated circuits on large-area graphene in order to realize practical applications, e.g. an advanced ¿electronic nose¿ system. Utilizing recent advances in graphene and graphene oxide preparation and functionalization techniques, we aim to achieve fabrication of sensor arrays using conventional photolithography, where signals from the array are coupled to signal-conditioning electronics and sensor responses fed to odor recognition algorithms to perform detection and classification of vapors.
Keywords :
chemical sensors; electronic noses; field effect transistors; graphene; photolithography; sensor arrays; C; chemical affinity; chemical sensing; electronic nose; field effect transistors; functionalization techniques; functionalized graphene devices; graphene oxide preparation; integrated circuits; large sensor array; photolithography; sensor responses; signal-conditioning electronics; single-layer graphene; Chemical sensors; Chemical vapor deposition; FETs; Fabrication; Hydrogen; Lithography; Optical films; Semiconductor films; Sensor arrays; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
Type :
conf
DOI :
10.1109/INEC.2010.5424637
Filename :
5424637
Link To Document :
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