Characterization of three phase unidirectional transducers

To characterize three phase unidirectional transducer (TPUDT) transmission and reflection properties, a PC-based analysis and mask structure layout program is developed and a study of TPUDT crossover fabrication is performed. The analysis program can be used to calculate the equivalent circuit model elements by charge superposition, thin film loss, matching and phasing elements, and the forward and reverse response of the transducer. The structure program is capable of generating balanced apodized transducers based on user-defined time impulse weighting data. Test devices are designed using a balance apodized structure. A novel TPUDT reflector is produced using a single three-phase transducer with a single inductor. Common dielectrics used for isolation in semiconductor fabrication, including spin on glass (SOG) and polyimide, are evaluated and a reliable fabrication process is developed