Title :
Circular Grating Resonators as Micro-Cavities for Optical Modulators
Author :
Moll, Nikolaj ; Schönenberger, Sophie ; Stöferle, Thilo ; Wahlbrink, Thorsten ; Bolten, Jens ; Mollenhauer, Thomas ; Moormann, Christian ; Mahrt, Rainer F. ; Offrein, Bert J.
Author_Institution :
Zurich Res. Lab., IBM Res., Zurich
Abstract :
Because of their small footprint circular grating resonators (CGR) could lead to the development of very advanced silicon-on-insulator (SOI) based nano-photonic devices clearly beyond state of the art in terms of functionality, size, speed, cost, and integration density. These photonic micro-cavities which are computationally designed and studied in their functionality. Using the computational design parameters the CGRs are fabricated in SOI. The transmission spectra exhibit a wide range of different type of resonances with measured Q-factors higher than 1000.
Keywords :
diffraction gratings; integrated optics; micro-optics; micro-optomechanical devices; microcavities; micromechanical resonators; optical design techniques; optical fabrication; optical modulation; optical resonators; silicon-on-insulator; Q-factor measurement; Si-SiO2; circular grating resonator fabrication; nano-photonic devices; optical modulators; photonic micro-cavity design; silicon-on-insulator; transmission spectra; Bragg gratings; Electrooptic modulators; Lattices; Mirrors; Optical computing; Optical modulation; Optical resonators; Photonic band gap; Refractive index; Resonance; Electro-Optical Modulators; Micro-Cavities;
Conference_Titel :
Group IV Photonics, 2007 4th IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4244-0934-1
DOI :
10.1109/GROUP4.2007.4347711
