Circular Grating Resonators as Micro-Cavities for Optical Modulators

Author

Moll, Nikolaj ; Schönenberger, Sophie ; Stöferle, Thilo ; Wahlbrink, Thorsten ; Bolten, Jens ; Mollenhauer, Thomas ; Moormann, Christian ; Mahrt, Rainer F. ; Offrein, Bert J.

Author_Institution

Zurich Res. Lab., IBM Res., Zurich

fYear

2007

Firstpage

1

Lastpage

3

Abstract

Because of their small footprint circular grating resonators (CGR) could lead to the development of very advanced silicon-on-insulator (SOI) based nano-photonic devices clearly beyond state of the art in terms of functionality, size, speed, cost, and integration density. These photonic micro-cavities which are computationally designed and studied in their functionality. Using the computational design parameters the CGRs are fabricated in SOI. The transmission spectra exhibit a wide range of different type of resonances with measured Q-factors higher than 1000.

Keywords

diffraction gratings; integrated optics; micro-optics; micro-optomechanical devices; microcavities; micromechanical resonators; optical design techniques; optical fabrication; optical modulation; optical resonators; silicon-on-insulator; Q-factor measurement; Si-SiO₂; circular grating resonator fabrication; nano-photonic devices; optical modulators; photonic micro-cavity design; silicon-on-insulator; transmission spectra; Bragg gratings; Electrooptic modulators; Lattices; Mirrors; Optical computing; Optical modulation; Optical resonators; Photonic band gap; Refractive index; Resonance; Electro-Optical Modulators; Micro-Cavities;

fLanguage

English

Publisher

ieee

Conference_Titel

Group IV Photonics, 2007 4th IEEE International Conference on

Conference_Location

Tokyo

Print_ISBN

978-1-4244-0934-1

Type

conf

DOI

10.1109/GROUP4.2007.4347711

Filename

4347711