PLZT Electro-Optic Modulators on Si Substrates Using Aerosol Deposition for On-Chip Optical Interconnections

Author

Shimizu, T. ; Nakada, M. ; Tsuda, H. ; Akedo, J. ; Nishi, K. ; Ohashi, K.

Author_Institution

MIRAI-Selete, Tsukuba

fYear

2007

Firstpage

1

Lastpage

3

Abstract

We developed lanthanum modified lead zirconate titanate, (Pb,La)(Zr,Ti)O₃ (PLZT), electro-optic modulators on a Si substrate using aerosol deposition (AD) for on-chip optical interconnections. The modulator was designed as a 250 times 300 mum ring resonator with a 7 dB extinction ratio at 3 V_p-p. We observed the optical transmission of a PZT waveguide and the transmission loss was as small as 4 dB/mm.

Keywords

electro-optical modulation; integrated optics; lanthanum compounds; lead compounds; optical design techniques; optical interconnections; optical losses; optical resonators; optical waveguide components; PLZT; PZT; Si; aerosol deposition; electro-optic modulator design; extinction ratio; lanthanum modified lead zirconate titanate; on-chip optical interconnections; optical transmission loss; optical waveguide; ring resonator; size 250 mum; size 300 mum; Aerosols; Electrooptic modulators; Extinction ratio; Lanthanum; Lead; Optical interconnections; Optical modulation; Optical ring resonators; Optical waveguides; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Group IV Photonics, 2007 4th IEEE International Conference on

Conference_Location

Tokyo

Print_ISBN

978-1-4244-0934-1

Type

conf

DOI

10.1109/GROUP4.2007.4347718

Filename

4347718