Title :
Mechanically flexible PZT thin films on plastic substrates
Author :
Rho, Jong Hyun ; Ahn, Joung Ho ; Lee, Nae-Eung ; Jong-Hyun Ahn
Author_Institution :
Sch. of Adv. Mater. Sci. & Eng., Sungkyunkwan Univ., Suwon, South Korea
Abstract :
We investigated the fabrication and properties of flexible PZT thin film on plastic substrate. The PZT active layer with Pt electrodes was fabricated on SiO2/Si wafer by sol-gel method. These Pt/PZT/Pt layers were patterned by photolithography with optimized layouts. After Pt/PZT/Pt etching process, these layers were transferred on plastic substrate using elastomeric stamp. The properties of transferred layers were closed to that of traditional PZT devices on rigid bulk wafers.
Keywords :
electrodes; etching; ferroelectric thin films; lead compounds; nanofabrication; photolithography; plastics; platinum; silicon; silicon compounds; sol-gel processing; zirconium compounds; PbZrxTi1+xO3-Pt; PbZrxTi1-xO3-Pt; SiO2-Si; elastomeric stamp; electrodes; etching process; mechanically flexible PZT thin films; optimized layouts; photolithography; plastic substrates; rigid bulk wafers; sol-gel method; transferred layers; Plastic films;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5424663
