Title :
Fabrication of large area photonic crystals with periodic defects by one-step phase-controlled holographic lithography
Author :
Zhong, Yongchun ; Ma, Jie ; Chen, Zhe ; Zhou, Jianying ; Wong, Kam Sing
Author_Institution :
Dept. of Phys., Hong Kong Univ. of Sci. & Technol., Hong Kong, China
Abstract :
A one-step introduction of functional defects into a photonic crystal (PC) is demonstrated. By using a multi-beam phase-controlled holographic lithography and a diffracting optical element, large area one dimensional (1D) and two dimensional (2D) PCs with periodic defects was fabricated. The uniform area is up to 4 mm2. Three dimensional photonic crystal with intrinsic defect can also be fabricated by this technique.
Keywords :
diffractive optical elements; holography; optical fabrication; phase control; photolithography; photonic crystals; 1D PC; 2D PC; diffracting optical element; functional defects; intrinsic defect; large area one dimensional PC; large area photonic crystals; large area two dimensional PC; one-step multibeam phase-controlled holographic lithography; periodic defects; three dimensional photonic crystal; uniform area; Educational institutions; Fabrication; Interference; Laser beams; Lenses; Lithography; Photonic crystals;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
