• DocumentCode
    1661094
  • Title

    Fabrication of large area photonic crystals with periodic defects by one-step phase-controlled holographic lithography

  • Author

    Zhong, Yongchun ; Ma, Jie ; Chen, Zhe ; Zhou, Jianying ; Wong, Kam Sing

  • Author_Institution
    Dept. of Phys., Hong Kong Univ. of Sci. & Technol., Hong Kong, China
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A one-step introduction of functional defects into a photonic crystal (PC) is demonstrated. By using a multi-beam phase-controlled holographic lithography and a diffracting optical element, large area one dimensional (1D) and two dimensional (2D) PCs with periodic defects was fabricated. The uniform area is up to 4 mm2. Three dimensional photonic crystal with intrinsic defect can also be fabricated by this technique.
  • Keywords
    diffractive optical elements; holography; optical fabrication; phase control; photolithography; photonic crystals; 1D PC; 2D PC; diffracting optical element; functional defects; intrinsic defect; large area one dimensional PC; large area photonic crystals; large area two dimensional PC; one-step multibeam phase-controlled holographic lithography; periodic defects; three dimensional photonic crystal; uniform area; Educational institutions; Fabrication; Interference; Laser beams; Lenses; Lithography; Photonic crystals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325937