Title :
Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication
Author :
Lin, J. ; Fang, W. ; Cheng, Y. ; Yu, S.J. ; Ma, Y.G. ; He, F. ; Qiao, L. ; Tong, L. ; Xu, Z.
Author_Institution :
State Key Lab. of High Field Laser Phys., Shanghai, China
Abstract :
We report on fabrication of ultra-high-Q (~106) whispering gallery microcavities on a fused silica chip using a femtosecond laser, enabled by the high spatial resolution and three-dimensional nature of femtosecond laser direct writing.
Keywords :
Q-factor; high-speed optical techniques; integrated optics; laser materials processing; microcavities; microfabrication; optical fabrication; silicon compounds; whispering gallery modes; SiO2; femtosecond laser direct writing; fused silica chips; spatial resolution; three-dimensional femtosecond laser microfabrication; ultrahigh-Q whispering gallery microcavities; Measurement by laser beam; Microcavities; Optical device fabrication; Silicon compounds; Surface emitting lasers; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
