• DocumentCode
    1662667
  • Title

    Applications of the Thermal Step Method to the Characterization of Electric Charge in MOS Components

  • Author

    Fruchier, O. ; Notingher, P., Jr. ; Agnel, S. ; Toureille, A. ; Forest, F. ; Cunningham, S. ; Rousset, B. ; Sanchez, J.L.

  • Author_Institution
    Univ. of Montpellier 2, Montpellier
  • fYear
    2007
  • Firstpage
    444
  • Lastpage
    451
  • Abstract
    This work is concerned with the development of a non destructive method for measuring electric charge in metal-oxide-semiconductor (MOS) components and devices. The aim is to obtain further information on microelectronics and power electronics components and, using the gate oxide state, to assess semiconductors health. Results obtained on MOS samples with oxide thicknesses of 2 nm, 50 nm and 120 nm, and on power electronics modules are presented.
  • Keywords
    MOSFET; charge measurement; semiconductor device measurement; MOS components; electric charge characterization; nondestructive method; power electronics modules; semiconductors health assessment; size 120 nm; size 2 nm; size 50 nm; thermal step method; Aging; Circuits; Copper; Insulated gate bipolar transistors; Insulation; Microelectronics; Power electronics; Power system reliability; Power system security; Stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industry Applications Conference, 2007. 42nd IAS Annual Meeting. Conference Record of the 2007 IEEE
  • Conference_Location
    New Orleans, LA
  • ISSN
    0197-2618
  • Print_ISBN
    978-1-4244-1259-4
  • Electronic_ISBN
    0197-2618
  • Type

    conf

  • DOI
    10.1109/07IAS.2007.72
  • Filename
    4347821