High frequency threshold improvement of electro-static micro-relays

Author

Efremov, G.I. ; Mukhurov, N.I.

Author_Institution

Inst. of Electron., Acad. of Sci., Minsk, Belarus

Volume

1

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

401

Abstract

This paper describes one of the ways of building micromechanical threshold transducers based on unique dielectric and mechanic properties of anodic alumina Functional components of such transducers carry thin-film conductive elements formed by vacuum evaporation and are formed with precise accuracy offered by methods of planar microelectronic technology. All structural elements of the transducers are fabricated in a single monolithic substrate, which greatly reduces errors and complexity of assembly work. The possibility is demonstrated of making micromechanical threshold transducers with universal design of converter element of anodic alumina, which ensures high sensitivity to variations in geometric size, acting force, acceleration, and temperature

Keywords

alumina; electrostatic actuators; integrated circuit technology; micromachining; relays; thin film devices; transducers; Al₂O₃; acceleration; anodic alumina; dielectric properties; errors; mechanical properties; micromechanical threshold transducers; planar microelectronic technology; single monolithic substrate; temperature; thin-film conductive elements; vacuum evaporation; Buildings; Conductive films; Dielectric substrates; Dielectric thin films; Frequency; Mechanical factors; Micromechanical devices; Microrelays; Transducers; Vacuum technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics, Circuits and Systems, 2001. ICECS 2001. The 8th IEEE International Conference on

Print_ISBN

0-7803-7057-0

Type

conf

DOI

10.1109/ICECS.2001.957764

Filename

957764