Title :
High frequency threshold improvement of electro-static micro-relays
Author :
Efremov, G.I. ; Mukhurov, N.I.
Author_Institution :
Inst. of Electron., Acad. of Sci., Minsk, Belarus
fDate :
6/23/1905 12:00:00 AM
Abstract :
This paper describes one of the ways of building micromechanical threshold transducers based on unique dielectric and mechanic properties of anodic alumina Functional components of such transducers carry thin-film conductive elements formed by vacuum evaporation and are formed with precise accuracy offered by methods of planar microelectronic technology. All structural elements of the transducers are fabricated in a single monolithic substrate, which greatly reduces errors and complexity of assembly work. The possibility is demonstrated of making micromechanical threshold transducers with universal design of converter element of anodic alumina, which ensures high sensitivity to variations in geometric size, acting force, acceleration, and temperature
Keywords :
alumina; electrostatic actuators; integrated circuit technology; micromachining; relays; thin film devices; transducers; Al2O3; acceleration; anodic alumina; dielectric properties; errors; mechanical properties; micromechanical threshold transducers; planar microelectronic technology; single monolithic substrate; temperature; thin-film conductive elements; vacuum evaporation; Buildings; Conductive films; Dielectric substrates; Dielectric thin films; Frequency; Mechanical factors; Micromechanical devices; Microrelays; Transducers; Vacuum technology;
Conference_Titel :
Electronics, Circuits and Systems, 2001. ICECS 2001. The 8th IEEE International Conference on
Print_ISBN :
0-7803-7057-0
DOI :
10.1109/ICECS.2001.957764
