Title :
Silicon-on-insulator integrated optical biosensors for environmental monitoring
Author :
Newman, Jeffrey D. ; Turner, Anthony P F ; Rickman, Andrew G. ; Harpin, Arnold P R ; Shaw, Matthew P. ; McKenzie, James S.
Author_Institution :
Biotechnology Centre, Cranfield Univ., UK
fDate :
11/15/1995 12:00:00 AM
Abstract :
It is shown that the fabrication of a family of silicon based evanescent optical field sensors can be produced using well established silicon microelectronics processes. Such devices offer advantages of low cost and high sensitivity compared with conventional technologies. A further cost advantage arises from the generic nature of the technology. This is largely due to the active features of silicon circuits. New sensors will only require the development of appropriate receptor layers. Ink-jet printing provides the means to produce highly controlled droplets of very low volume. These can be printed at high speed and are controlled by a microprocessor. It is therefore possible to produce small receptor film regions
Keywords :
biosensors; chemical sensors; elemental semiconductors; integrated optics; light interferometers; optical waveguides; pollution measurement; printing; silicon-on-insulator; ASOC technology; SOI integrated optical biosensors; Si-SiO2; active integrated optic circuits; active interferometer incorporation; elemental semiconductor; environmental monitoring; evanescent optical field sensors; fabrication; high sensitivity; highly controlled droplets; immunosensors; ink-jet printing; low cost; microprocessor control; nonspecific binding; optimum waveguide structure; receptor layers; small receptor film regions;
Conference_Titel :
Optical Techniques for Environmental Monitoring, IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19951117