DocumentCode :
1664024
Title :
Electrical properties of Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) epitaxial films grown on Si substrates
Author :
Jiang, Juan ; Seong, Nak-Jin ; Hwang, Hyun-Hee ; Lee, Won-Jae ; Yoon, Soon-Gil
Author_Institution :
Sch. of Nano Sci. & Technol., Chungnam Nat. Univ., Daejeon, South Korea
fYear :
2010
Firstpage :
456
Lastpage :
457
Abstract :
Epitaxially grown PMN-PT thin films using the PMN-PT single crystal targets were prepared at 550°C on appropriate buffer layers of LSCO/CeO2/YSZ deposited on a Si substrate using pulsed laser deposition. The micro-structural and the electrical properties of the films were investigated as a function of the film thickness. The PMN-PT films with the thickness from 20 to 600 nm exhibited an epitaxial nature with a pure perovskite structure. On the other hand, the films above 700 nm included a pyrochlore phase embedded in the perovskite structure although they exhibited an epitaxial nature. A pyrochlore phase included in the films above 700 nm thickness decreased the dielectric constant and the ferroelectric properties of the PMN-PT films.
Keywords :
buffer layers; cerium compounds; crystal microstructure; epitaxial growth; epitaxial layers; ferroelectric capacitors; ferroelectric materials; ferroelectric thin films; lanthanum compounds; lead compounds; permittivity; platinum; pulsed laser deposition; silicon; strontium compounds; yttrium compounds; zirconium compounds; LSCO-ceria-YSZ deposiion; LaSrCuO-CeO2-Y2O3ZrO2; PMN-PT single crystal targets; PMN-PbTiO3; Pb(Mg0.33Nb0.67)O3-PbTiO3; Si; buffer layers; dielectric constant; epitaxially grown thin films; ferroelectric properties; film thickness; microstructural properties; perovskite structure; pulsed laser deposition; pyrochlore phase; size 20 nm to 600 nm; temperature 550 degC; Appropriate technology; Buffer layers; Dielectric thin films; Ferroelectric films; Ferroelectric materials; Pulsed laser deposition; Semiconductor films; Semiconductor thin films; Substrates; X-ray scattering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
Type :
conf
DOI :
10.1109/INEC.2010.5424793
Filename :
5424793
Link To Document :
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