Title :
High precision control of the piezo-actuated stage
Author :
Ozaki, Toshikuni ; Chen, Xinkai
Author_Institution :
Grad. Sch., Shibaura Inst. of Technol., Saitama, Japan
Abstract :
The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.
Keywords :
adaptive control; hysteresis; nanopositioning; piezoelectric actuators; Prandtl-Ishlinskii model; adaptive control; control law; friction behavior; high precision control; hysteretic nonlinearity; piezo-actuated nano-positioner; piezo-actuated stage; piezoelectric actuator; position control; positioning mechanism; zero output tracking; Integrated circuits;
Conference_Titel :
Modelling, Identification and Control (ICMIC), The 2010 International Conference on
Conference_Location :
Okayama
Print_ISBN :
978-1-4244-8381-5
Electronic_ISBN :
978-0-9555293-3-7
