• DocumentCode
    1664527
  • Title

    Flexible and tunable silicon photonic devices

  • Author

    Chen, Yu ; Li, Huan ; Li, Mo

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate flexible silicon photonic devices, including ring resonators and Mach-Zehnder interferometers, by transferring from SOI wafer to PDMS. Optical characteristics of these devices could be tuned by deforming the flexible substrate.
  • Keywords
    Mach-Zehnder interferometers; integrated optics; optical polymers; optical resonators; optical tuning; silicon-on-insulator; Mach-Zehnder interferometers; PDMS; SOI wafer; Si; flexible silicon photonic devices; flexible substrate; optical characteristics; ring resonators; tunable silicon photonic devices; Optical interferometry; Optical ring resonators; Optical waveguides; Photonics; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6326062
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1664527