Title :
Flexible and tunable silicon photonic devices
Author :
Chen, Yu ; Li, Huan ; Li, Mo
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
We demonstrate flexible silicon photonic devices, including ring resonators and Mach-Zehnder interferometers, by transferring from SOI wafer to PDMS. Optical characteristics of these devices could be tuned by deforming the flexible substrate.
Keywords :
Mach-Zehnder interferometers; integrated optics; optical polymers; optical resonators; optical tuning; silicon-on-insulator; Mach-Zehnder interferometers; PDMS; SOI wafer; Si; flexible silicon photonic devices; flexible substrate; optical characteristics; ring resonators; tunable silicon photonic devices; Optical interferometry; Optical ring resonators; Optical waveguides; Photonics; Silicon; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
