Design and analysis of a 2-DOF micro-motion stage based on flexural hinges

This paper presents the design of an approximately decoupled XY micro-motion stage, which adopts the double four-bar prismatic joints to transfer linear motions and a proper type of displacement amplifier. The compliance models of the amplifier, the prismatic joints, and the whole stage are established based on the flexibility matrix method. Based on the input compliance model, the amplification ratio is elaborated. The simulation is made by using finite element analysis software, the simulation results show that the input/output of the stage has a very good linearity, the ratio of output displacement to input displacement is 4. The output cross-talk is less than 2% and the parasitic motions of the input points in the other limbs are less than 1.8%, which shows a good decoupling property.