DocumentCode
1665006
Title
A Tool for CAE of Inductively Coupled Plasma Sources
Author
Kolobov, V.I. ; Wu, H-M. ; Krishnan, A.
Author_Institution
CFD Research Corporation, Huntsville, AL
fYear
1998
Firstpage
307
Lastpage
307
Abstract
Summary form only given.
Keywords
Computer aided engineering; Electron beams; Plasma accelerators; Plasma applications; Plasma density; Plasma measurements; Plasma simulation; Plasma sources; Plasma temperature; Plasma waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location
Raleigh, NC, USA
ISSN
0730-9244
Print_ISBN
0-7803-4792-7
Type
conf
DOI
10.1109/PLASMA.1998.677920
Filename
677920
Link To Document