A highly manufacturable 0.25μm RF technology utilizing a unique SiGe integration

Author

Johnson, F.S. ; Ai, J. ; Dunn, S. ; El Kareh, B. ; Erdeljac, J. ; John, S. ; Benaissa, K. ; Bellaour, A. ; Benna, B. ; Hodgson, L. ; Hoffleisch, G. ; Hutter, L. ; Jaumann, M. ; Jumpertz, R. ; Mercer, M. ; Nair, M. ; Seitchik, J. ; Shen, C. ; Schiekofer, M

Author_Institution

Texas Instrum. Inc., Dallas, TX, USA

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

56

Lastpage

59

Abstract

A new SiGe integration technique is introduced that allows the low cost integration of a self-aligned 65 GHz SiGe heterojunction bipolar transistor (HBT) with a 0.55dB noise figure (NF) using simple processing steps and a non-selective SiGe epitaxy deposition. The integration technique is presented as part of a 0.25μm production RF technology that includes SiGe NPNs, 14GHz PNPs, very high Q passives, high resistance substrates, drain-extended CMOS (DEMOS) and fully isolated CMOS wells. In addition to component characterization, measurements of fabricated WCDMA circuits are presented that demonstrate low power, low noise circuit operation

Keywords

BiCMOS integrated circuits; Ge-Si alloys; UHF integrated circuits; heterojunction bipolar transistors; integrated circuit noise; low-power electronics; semiconductor epitaxial layers; semiconductor materials; 0.25 micron; 0.55 dB; 14 GHz; 65 GHz; DEMOS; Q passives; RF technology; SiGe; WCDMA circuits; drain extended CMOS; fully isolated CMOS wells; heterojunction bipolar transistor; integration technique; low noise circuit; low power circuit; nonselective epitaxy deposition; Circuits; Costs; Epitaxial growth; Germanium silicon alloys; Heterojunction bipolar transistors; Manufacturing; Noise figure; Noise measurement; Radio frequency; Silicon germanium;

fLanguage

English

Publisher

ieee

Conference_Titel

Bipolar/BiCMOS Circuits and Technology Meeting, Proceedings of the 2001

Conference_Location

Minneapolis, MN

Print_ISBN

0-7803-7019-8

Type

conf

DOI

10.1109/BIPOL.2001.957856

Filename

957856