Title :
Robust design of subwavelength grating mirror for mid-infrared VCSEL application
Author :
Chevallier, Christyves ; Genty, Frédéric ; Fressengeas, Nicolas ; Jacquet, Joel
Author_Institution :
SUPELEC, Metz, France
Abstract :
We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.
Keywords :
elemental semiconductors; laser cavity resonators; laser mirrors; light polarisation; optical design techniques; optical fabrication; optimisation; physics computing; reflectivity; silicon; silicon compounds; surface emitting lasers; Si-Si3N4; fabrication error; grating dimension tolerances; high reflectivity structure; midinfrared VCSEL application; optimization algorithm; polarization selective structure; quality factor; robust design; robustness; subwavelength grating mirror; Bandwidth; Fabrication; Gratings; Mirrors; Optimization; Silicon; Vertical cavity surface emitting lasers;
Conference_Titel :
Numerical Simulation of Optoelectronic Devices (NUSOD), 2011 11th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-61284-876-1
Electronic_ISBN :
2158-3234
DOI :
10.1109/NUSOD.2011.6041173
