Title :
Self-aligned silicon fins in metallic slits as a platform for planar tunable nanoscale resonant photodetectors
Author :
Balram, Krishna C. ; Miller, David A B
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
Abstract :
We demonstrate self-aligned fabrication of etched silicon fins in metallic slits and show that this structure supports both dielectric and plasmonic resonances and photodetection that can be tuned by varying the width of the fin.
Keywords :
elemental semiconductors; nanophotonics; optical fabrication; photodetectors; silicon; Si; dielectric resonances; metallic slits; photodetection; planar tunable nanoscale resonant photodetectors; plasmonic resonances; self-aligned fabrication; self-aligned fins; Absorption; Detectors; Dielectrics; Fabrication; Metals; Plasmons; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
