Title :
Design and fabrication of single-chip carbon nanotubes vacuum field emission differential amplifier
Author :
Wong, Y.M. ; Kang, W.P. ; Davidson, J.L. ; Choi, B.K. ; Kerns, D.V. ; Huang, J.H.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Vanderbilt Univ., Nashville, TN, USA
Abstract :
In this paper, the design and fabrication of a single chip carbon nanotubes (CNT) vacuum field emission differential amplifier (VFE diff-amp) is presented for the first time. A dual-mask microfabrication process is employed to achieve the single-chip VFE diff-amp that integrates two identical vacuum field emission transistors with built-in split gates and integrated anodes.
Keywords :
carbon nanotubes; differential amplifiers; field emission; masks; nanotube devices; vacuum microelectronics; C; dual-mask microfabrication; integrated anodes; single chip carbon nanotubes vacuum field emission differential amplifier; split gates; vacuum field emission transistors; Carbon nanotubes; Circuit testing; Computer science; Differential amplifiers; Educational institutions; Fabrication; Microelectronics; Plasma chemistry; Research and development; Vacuum technology; MPCVD; carbon nanotubes; differential amplifier; field emission; integrated circuits;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619471
