DocumentCode
1666383
Title
Fabrication of gated carbon black field electron emitter using inkjet printing
Author
Baba, Akiya ; Ishida, Yuji ; Hakiai, Kazunori ; Asano, Tanemasa
Author_Institution
Center for Microelectron. Syst., Kyushu Inst. of Technol., Fukuoka, Japan
fYear
2005
Firstpage
42
Lastpage
43
Abstract
A gated field emitter array (FEA) fabrication method was developed using combined ink jet printing and photolithography. Using the proposed fabrication process, the field electron emission from the gated carbon black FEA was demonstrated. Surface treatment, droplet drying, and separation between the gate and carbon black are the key steps to successful fabrication of the gated FEA. This proposed method is expected to facilitate the development of a large area field emission display (FED) with low cost and low temperature processing. Low temperature processing characteristic has a potential application to FEDs on a plastic substrate for a flexible display.
Keywords
carbon; field emission displays; field emitter arrays; photolithography; C; droplet drying; field emission display; gated carbon black field electron emitter; inkjet printing; photolithography; surface treatment; Carbon dioxide; Electron emission; Electron guns; Fabrication; Field emitter arrays; Flat panel displays; Ink jet printing; Lithography; Surface treatment; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN
0-7803-8397-4
Type
conf
DOI
10.1109/IVNC.2005.1619475
Filename
1619475
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