Title :
Fabrication of gated carbon black field electron emitter using inkjet printing
Author :
Baba, Akiya ; Ishida, Yuji ; Hakiai, Kazunori ; Asano, Tanemasa
Author_Institution :
Center for Microelectron. Syst., Kyushu Inst. of Technol., Fukuoka, Japan
Abstract :
A gated field emitter array (FEA) fabrication method was developed using combined ink jet printing and photolithography. Using the proposed fabrication process, the field electron emission from the gated carbon black FEA was demonstrated. Surface treatment, droplet drying, and separation between the gate and carbon black are the key steps to successful fabrication of the gated FEA. This proposed method is expected to facilitate the development of a large area field emission display (FED) with low cost and low temperature processing. Low temperature processing characteristic has a potential application to FEDs on a plastic substrate for a flexible display.
Keywords :
carbon; field emission displays; field emitter arrays; photolithography; C; droplet drying; field emission display; gated carbon black field electron emitter; inkjet printing; photolithography; surface treatment; Carbon dioxide; Electron emission; Electron guns; Fabrication; Field emitter arrays; Flat panel displays; Ink jet printing; Lithography; Surface treatment; Temperature;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619475