• DocumentCode
    1666529
  • Title

    Chemical gettering at high pressures

  • Author

    Peters, R.D. ; Hatfield, L.L. ; Kristiansen, M.

  • Author_Institution
    Dept. of Phys. & Electr. Eng., Texas Tech. Univ., Lubbock, TX, USA
  • fYear
    1998
  • Firstpage
    310
  • Abstract
    Summary form only given. Conventional gettering involves the scavenging of gases in a chamber after the pressure has been first lowered with at least a mechanical pump. Once gettering is complete, as in a vacuum tube; the amount of desorbed gas which would require follow-on pumping is not normally significant. The same is not true for a variety of systems of current interest to the plasma community. The impracticality of connecting an external pump to a fielded system caused us to research the feasibility of gettering at high pressures. It was found that the pressure of carbon dioxide in a closed chamber can be dramatically reduced by letting it react with a mixture of sodium hydroxide and magnesium perchlorate. By distributing the solid reactants throughout a porous substrate to maintain an uncorrupted large surface area, it was found that the chamber pressure in a container of volume 20 filters could be reduced from 1000 mTorr to 100 mTorr a dozen times, with the pumping time in each case being only about two minutes.
  • Keywords
    chemisorption; getters; high-pressure techniques; pumps; 1000 to 100 mtorr; CO/sub 2/; NaOH-Mg(ClO/sub 4/)/sub 2/; NaOH-Mg(ClO/sub 4/)/sub 2/ mixture; chamber pressure; chemical gettering; desorbed gas; external pump; fielded system; gas scavenging; high pressures; large surface area; mechanical pump; plasma community; porous substrate; pumping time; reactant distribution; solid reactants; Carbon dioxide; Chemicals; Containers; Electron tubes; Gases; Gettering; Joining processes; Magnesium compounds; Plasmas; Solids;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
  • Conference_Location
    Raleigh, NC, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-4792-7
  • Type

    conf

  • DOI
    10.1109/PLASMA.1998.677930
  • Filename
    677930