• DocumentCode
    1667067
  • Title

    Observation of regular arrangement of twin-grains in C/sub 2/H/sub 4//SiH/sub 4//Ar rf plasma

  • Author

    Maofu Ye ; Jie Zhao ; Tianhui Zhang

  • Author_Institution
    Inst. of Phys., Acad. Sinica, Beijing, China
  • fYear
    1998
  • Firstpage
    312
  • Abstract
    Summary form only given. An important concern is the attraction between charge particulates in Coulomb crystal existing in a strongly coupled dusty plasma. Furthermore, the assumption on formation of dust molecule as a first step to super-chemistry was presented. We report the first direct observation of twin-grains (a possible molecule-like state, which means two or more dust grains stuck together, e.g. triplet etc.) with a regular arrangement using an optical microimaging system in a rf plasma.
  • Keywords
    argon; organic compounds; plasma diagnostics; plasma impurities; silicon compounds; Coulomb crystal; charge particulates; dust grains; dust molecule; ethylene/SiH/sub 4//Ar RF plasma; molecule-like state; optical microimaging system; regular arrangement; strongly coupled dusty plasma; super-chemistry; twin-grains arrangement; Boltzmann equation; Dusty plasma; Electrons; Laboratories; Particle beams; Physics; Plasma materials processing; Radio frequency; Surface contamination; Surface discharges;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
  • Conference_Location
    Raleigh, NC, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-4792-7
  • Type

    conf

  • DOI
    10.1109/PLASMA.1998.677932
  • Filename
    677932