DocumentCode
1667067
Title
Observation of regular arrangement of twin-grains in C/sub 2/H/sub 4//SiH/sub 4//Ar rf plasma
Author
Maofu Ye ; Jie Zhao ; Tianhui Zhang
Author_Institution
Inst. of Phys., Acad. Sinica, Beijing, China
fYear
1998
Firstpage
312
Abstract
Summary form only given. An important concern is the attraction between charge particulates in Coulomb crystal existing in a strongly coupled dusty plasma. Furthermore, the assumption on formation of dust molecule as a first step to super-chemistry was presented. We report the first direct observation of twin-grains (a possible molecule-like state, which means two or more dust grains stuck together, e.g. triplet etc.) with a regular arrangement using an optical microimaging system in a rf plasma.
Keywords
argon; organic compounds; plasma diagnostics; plasma impurities; silicon compounds; Coulomb crystal; charge particulates; dust grains; dust molecule; ethylene/SiH/sub 4//Ar RF plasma; molecule-like state; optical microimaging system; regular arrangement; strongly coupled dusty plasma; super-chemistry; twin-grains arrangement; Boltzmann equation; Dusty plasma; Electrons; Laboratories; Particle beams; Physics; Plasma materials processing; Radio frequency; Surface contamination; Surface discharges;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location
Raleigh, NC, USA
ISSN
0730-9244
Print_ISBN
0-7803-4792-7
Type
conf
DOI
10.1109/PLASMA.1998.677932
Filename
677932
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