DocumentCode :
1667067
Title :
Observation of regular arrangement of twin-grains in C/sub 2/H/sub 4//SiH/sub 4//Ar rf plasma
Author :
Maofu Ye ; Jie Zhao ; Tianhui Zhang
Author_Institution :
Inst. of Phys., Acad. Sinica, Beijing, China
fYear :
1998
Firstpage :
312
Abstract :
Summary form only given. An important concern is the attraction between charge particulates in Coulomb crystal existing in a strongly coupled dusty plasma. Furthermore, the assumption on formation of dust molecule as a first step to super-chemistry was presented. We report the first direct observation of twin-grains (a possible molecule-like state, which means two or more dust grains stuck together, e.g. triplet etc.) with a regular arrangement using an optical microimaging system in a rf plasma.
Keywords :
argon; organic compounds; plasma diagnostics; plasma impurities; silicon compounds; Coulomb crystal; charge particulates; dust grains; dust molecule; ethylene/SiH/sub 4//Ar RF plasma; molecule-like state; optical microimaging system; regular arrangement; strongly coupled dusty plasma; super-chemistry; twin-grains arrangement; Boltzmann equation; Dusty plasma; Electrons; Laboratories; Particle beams; Physics; Plasma materials processing; Radio frequency; Surface contamination; Surface discharges;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location :
Raleigh, NC, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-4792-7
Type :
conf
DOI :
10.1109/PLASMA.1998.677932
Filename :
677932
Link To Document :
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