• DocumentCode
    1667388
  • Title

    Control and sensing platform of magnetically driven microtool for on-chip single cell evaluation

  • Author

    Kawahara, Tomohiro ; Hagiwara, Masaya ; Yamanishi, Yoko ; Arai, Fumihito

  • Author_Institution
    Grad. Sch. of Eng., Nagoya Univ., Nagoya, Japan
  • fYear
    2010
  • Firstpage
    322
  • Lastpage
    327
  • Abstract
    In this paper, we discuss a development of control and sensing platform for an on-chip single cell evaluation by magnetically driven microtool (MMT). The design and fabrication of the MMT is shown. Through the basic experiments, the advantage of the proposed platform, the performance of the position control (positioning accuracy: 30 μm), and the force sensing (sensing accuracy: 100 μN) of the MMT are confirmed.
  • Keywords
    bioMEMS; biomagnetism; cellular biophysics; force sensors; medical control systems; microsensors; position control; force sensing; magnetically driven microtool; on-chip single cell evaluation; position control; Displacement measurement; Glass; Magnetic force microscopy; Micromanipulators; Microscopy; Silicon; Thickness measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro-NanoMechatronics and Human Science (MHS), 2010 International Symposium on
  • Conference_Location
    Nagoya
  • Print_ISBN
    978-1-4244-7995-5
  • Type

    conf

  • DOI
    10.1109/MHS.2010.5669528
  • Filename
    5669528
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1667388