Title :
Nonlocal calculations of low pressure DC discharges with dust particles
Author :
Wang Dezhen ; Deng Ninlu
Author_Institution :
Dept. of Phys., Dalian Univ. of Technol., China
Abstract :
Summary form only given. The electron Boltzmann equation for an argon plasma with dust particles in cylindrical geometry is treated by the nonlocal approach, and the dust charging balance equation is solved self-consistently. The effects of particulate contamination on the electron kinetics and the dust particle surface potential as a function of discharge radius are investigated. The presence of dust particles reduces the effective electron temperature, the electron excitation and ionization rate coefficients. The effects of particulate contamination on the electron kinetics are spatial irregularities and the dust particle surface potentials are also spatially nonuniform in radius direction of discharge.
Keywords :
Boltzmann equation; argon; discharges (electric); ionisation; plasma impurities; plasma kinetic theory; plasma transport processes; Ar; Ar plasma; cylindrical geometry; dust charging balance equation; dust particle surface potential; dust particle surface potentials; dust particles; effective electron temperature; electron Boltzmann equation; electron excitation; electron kinetics; ionization rate coefficients; low pressure DC discharges; nonlocal approach; nonlocal calculations; particulate contamination; spatial irregularities; Argon; Boltzmann equation; Dusty plasma; Electrons; Geometry; Kinetic theory; Surface charging; Surface contamination; Surface discharges; Surface treatment;
Conference_Titel :
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location :
Raleigh, NC, USA
Print_ISBN :
0-7803-4792-7
DOI :
10.1109/PLASMA.1998.677933