Title :
Parameter dispersion characterization for arrays of HfC-coated emitters on poly-Si substrate
Author :
Nicolaescu, D. ; Nagao, M. ; Filip, V. ; Tanoue, H. ; Kanemaru, S. ; Itoh, J.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Tech., Ibaraki, Japan
Abstract :
This paper reports characterization results for the field emission statistics of the HfC/poly-Si arrays. A model for the array field emission has been developed, considering non-uniform distributions for both the radius and the work function. Array current-voltage measurements were used to extract model parameters.
Keywords :
field emitter arrays; hafnium compounds; work function; HfC-Si; HfC-coated emitter; Si; array field emission; current-voltage measurement; nonuniform distribution; parameter dispersion characterization; poly-Si substrate; work function; Crystallization; Current control; Current density; Distribution functions; Electron emission; Equations; Field emitter arrays; Hybrid fiber coaxial cables; Physics; Voltage;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619522
