Title :
Fabrication of photoresist microlens arrays
Author :
Alhokail, Hamad S.
fDate :
6/20/1905 12:00:00 AM
Abstract :
Microlens arrays are used in optical systems to direct light from sources to detectors. In this paper the method of melted photoresist is used to fabricate an array of microlenses. The experimental results as well as the main processing factors that affect the uniformity of such lenses are presented
Keywords :
integrated optics; integrated optoelectronics; microlenses; optical arrays; optical fabrication; photoresists; fabrication method; melted photoresist; micro optics; optical systems; photoresist microlens arrays; Fabrication; Glass; Indium phosphide; Lenses; Manufacturing; Microoptics; Optical arrays; Resists; Shape; Spinning;
Conference_Titel :
Microelectronics, 1998. ICM '98. Proceedings of the Tenth International Conference on
Conference_Location :
Monastir
Print_ISBN :
0-7803-4969-5
DOI :
10.1109/ICM.1998.825565
