Title :
Nanometer-scale imaging of field emission current from HfC thin films
Author :
Sato, T. ; Saida, M. ; Horikawa, K. ; Adachi, K. ; Nagao, M. ; Kanemaru, S. ; Yamamoto, S. ; Sasali, M.
Author_Institution :
Graduate Sch. of Pure & Appl. Sci., Tsukuba Univ., Ibaraki, Japan
Abstract :
The STM/FE images in a nanometer scale were successfully obtained by using an STM for the first time. The emission of electrons from grain boundaries of polycrystalline HfC films also reported, where work function is larger than that on the grains.
Keywords :
electron field emission; grain boundaries; hafnium compounds; scanning tunnelling microscopy; thin films; work function; HfC thin films; STM/FE images; electron emission; field emission current; grain boundaries; nanometer-scale imaging; polycrystalline HfC films; work function; Circuits; Electron emission; Feeds; Hybrid fiber coaxial cables; Iron; Magnetic field measurement; Microscopy; Surface topography; Transistors; Tunneling;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619527
