Title :
Electron emission properties of carbon nanotube FEAs evaluated with projection microscopy
Author :
Hata, K. ; Tatsumi, G. ; Sato, H. ; Saito, Y. ; Tsumagari, T.
Author_Institution :
Dept. of Electr. & Electron. Eng., Mie Univ., Tsu, Japan
Abstract :
In this paper, a projection microscope which consists of two electrostatic lenses with large spherical aberration coefficients were developed to determine the electron emission properties of carbon nanotube (CNT) field emitter array (FEA). This projection microscope allows the observations of the emitting directions of electron beams as well as the distributions of working emitters in the cathode plane.
Keywords :
carbon nanotubes; field emitter arrays; nanotube devices; optical microscopy; C; carbon nanotube; electron emission properties; electrostatic lenses; field emitter array; projection microscope; spherical aberration coefficients; Carbon nanotubes; Electrodes; Electron beams; Electron emission; Electron microscopy; Electrostatics; Field emitter arrays; Flat panel displays; Lenses; Voltage;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Conference_Location :
Oxford
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619534