• DocumentCode
    1667775
  • Title

    GHz optomechanical wheel and disk resonators with high mechanical Q factors in air

  • Author

    Sun, Xiankai ; Zhang, Xufeng ; Fong, King Y. ; Xiong, Chi ; Pernice, Wolfram H P ; Tang, Hong X.

  • Author_Institution
    Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Wheel- and disk-shaped Si optomechanical resonators are demonstrated with frequency up to 1.75 GHz and mechanical Q factors as high as 4370 at 1.41 GHz measured in air. Displacement sensitivity of 4.16×10-17 m/Hz1/2 is achieved.
  • Keywords
    Q-factor; elemental semiconductors; micro-optics; micromechanical resonators; optical resonators; silicon; wheels; GHz optomechanical wheel; Si; air; disk resonators; disk-shaped Si optomechanical resonators; displacement sensitivity; high mechanical Q factors; wheel-shaped Si optomechanical resonators; Mechanical variables measurement; Optical resonators; Optical sensors; Q factor; Radio frequency; Resonant frequency; Wheels;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6326195
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1667775