Status and technology of SOI substrate material

Silicon-on-insulator technology announcements during the past year show, without doubt, that SOI substrates are entering mainstream IC production. High performance microprocessors and advanced circuitry from significant worldwide chipmakers are moving to silicon-on-insulator substrates. Benefits from decreased operating voltages, low power consumption, higher radiation and temperature tolerance, and device scaling are realized in existing and planned SOI circuit applications. Key factors leading up to this present upbeat material status are that SOI substrate quality and cost have attained improved and acceptable levels for end-user industries. Areas of substrate material challenges remain, however, with respect to thin (<50nm) silicon material consistency, cost, and volume.