Title :
Field emission properties of lanthanum sulfide thin films deposited on Si and InP substrates by pulsed laser deposition
Author :
Cahay, M. ; Semet, V. ; Binh, Vu Thien ; Fairchild, S. ; Wu, X. ; Lockwood, D.J.
Author_Institution :
Dept. of ECECS, Cincinnati Univ., OH, USA
Abstract :
Thin films of lanthanum monosulfide (LaS) have been successfully deposited on Si and InP substrates by pulsed laser deposition. The values of deposition parameters (chamber pressure, substrate temperature, substrate-to-target separation, laser energy, repetition rate and spot size on the target) leading to a successful growth of cubic rocksalt structure films are identified. For the films grown on Si substrates, the root-mean-square (RMS) variation of surface roughness is found to be 1.74 nm by atomic force microscopy. XRD scans suggest the presence of amorphous regions in the film. This is confirmed by cross-section transmission electron microscopy analysis. For films grown on InP substrates, a thin crystalline film about 500 nm thick followed by an abrupt transition to an amorphous layer about 120 nm thick is observed. The work function of the LaS thin films deposited on Si substrates deduced from Fowler-Nordheim plots at room temperature has a mean value of 0.65 eV, when measured using the scanning field emission microscope technique (SAFEM) at very different locations across the sample. A strong dependence of the field emission current with temperature is also observed. At very large external electric field, the field emission increases dramatically and is no longer of the Fowler-Nordheim type.
Keywords :
X-ray diffraction; amorphous state; atomic force microscopy; field emission; lanthanum compounds; pulsed laser deposition; surface roughness; thin films; transmission electron microscopy; work function; 120 nm; 293 to 298 K; 500 nm; Fowler-Nordheim plots; InP; InP substrates; LaS; Si; Si substrates; XRD; amorphous layer; atomic force microscopy; chamber pressure; cross-section transmission electron microscopy; cubic rocksalt structure films; deposition parameters; field emission current; field emission properties; lanthanum sulfide thin films; laser energy; pulsed laser deposition; repetition rate; room temperature; root-mean-square variation; scanning field emission microscopy; spot size; substrate temperature; substrate-to-target separation; surface roughness; work function; Amorphous materials; Atomic force microscopy; Indium phosphide; Lanthanum; Optical pulses; Pulsed laser deposition; Semiconductor thin films; Sputtering; Substrates; Temperature;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619546