Title :
Identification of two-probe TLP contact resistance issues and proposed solutions
Author :
Liang Wang ; Rajagopal, Karthikeyan ; Kunz, Hans ; Concannon, Ann ; Brodsky, Jonathan
Author_Institution :
Analog Technol. Dev., Texas Instrum. Inc., Dallas, TX, USA
Abstract :
Inaccurate and unrepeatable TLP results have been obtained with a two-probe (2P) wafer-level system. This work identifies three distinct issues associated with probe contact resistance, which negatively impact TLP measurements. Two different solutions, Kelvin TLP and an improvement to 2P TLP measurements, are proposed and their pros and cons are discussed.
Keywords :
contact resistance; electrostatic discharge; 2P TLP measurements; 2P wafer-level system; Kelvin TLP; on-chip electrostatic discharge; transmission line pulsing; two-probe TLP contact resistance identification; two-probe wafer-level system; Calibration; Contact resistance; Electrical resistance measurement; Electrostatic discharges; Probes; Resistance; Stress;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2014 36th
Conference_Location :
Tucson, AZ
