• DocumentCode
    1668437
  • Title

    The effects of high work function electrodes on the electrical properties of solution processed ZnO thin film transistor

  • Author

    Chen, Tao ; Liu, Shu-Yi ; Deng, Shao-Ren ; Li, Bing-Zong ; Qu, Xin-Ping

  • Author_Institution
    Dept. of Microelectron., Fudan Univ., Shanghai, China
  • fYear
    2010
  • Firstpage
    1191
  • Lastpage
    1192
  • Abstract
    In this work, the effects of electrodes on the performance of sol-gel fabricated ZnO thin film transistor were investigated. The metal with high work function such as Pt was employed as the source-drain electrodes. Compared to the device with Al electrodes as reported before, the transistor fabricated with Pt electrode exhibited lower saturation voltage and current, which was due to the Schottky contact between the Pt electrode and the ZnO film. The result has also been proved by the current-voltage (IV) measurement of the Pt-ZnO-Pt structure. For the Schottky contact between the electrodes and the channel layer, the current saturated when the source was depleted. This kind of device reduced the operation voltage and power dissipations effectively.
  • Keywords
    II-VI semiconductors; Schottky barriers; electrodes; metal-semiconductor-metal structures; platinum; semiconductor thin films; thin film transistors; wide band gap semiconductors; work function; zinc compounds; Pt-ZnO-Pt; Schottky contact; channel layer; current-voltage measurement; operation voltage; power dissipations; saturation voltage; sol-gel process; source-drain electrodes; thin film transistor; work function; Coatings; Electrodes; Ion beams; Ohmic contacts; Pulsed laser deposition; Schottky barriers; Sputtering; Thin film transistors; Voltage; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2010 3rd International
  • Conference_Location
    Hong Kong
  • Print_ISBN
    978-1-4244-3543-2
  • Electronic_ISBN
    978-1-4244-3544-9
  • Type

    conf

  • DOI
    10.1109/INEC.2010.5424958
  • Filename
    5424958