Electron emission from planar-type cathodes based on nanocrystalline silicon thin films

Many types of cold cathodes have been studied to realize a high and stable electron emission current. Emission uniformity over a large cathode area and small energy dispersion in emitted electrons are essentially important for a field emission display and high frequency electron beam devices. In addition, a low cost and reliable fabrication of the cathode is also important. We have fabricated nanocrystalline Si planar cathodes by a laser ablation technique and investigated their emission characteristics.