Title :
Fabrications and characterization of Spindt-type field emission arrays coated with ZrC thin films
Author :
Li, Hanyan ; Ding, Ming Q. ; Feng, Jing J. ; Li, Xinghui ; Bai, Guodong ; Zhang, Fuquan
Author_Institution :
Nat. Lab. for High-Power Vacuum Electron., Beijing Vacuum Electron. Res. Inst., China
Abstract :
We reported on the fabrication and characterization of Spindt-type field emission arrays coated with ZrC thin films (ZrC-FEAs) and the effect of an aging process on their emission properties.
Keywords :
ageing; electron stimulated desorption; field emitter arrays; thin films; zinc compounds; Spindt-type field emission arrays; ZrC; ZrC thin films; aging; emission properties; emission-stimulated desorption; Aging; Chemicals; Coatings; Fabrication; Fluctuations; Laboratories; Stability; Transistors; Vacuum technology; Voltage;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619573
